Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments

G. Schondelmaier, S. Hartmann, D. May, A. Shaporin, S. Voigt, R. D. Rodriguez, O. D. Gordan, D. R. T. Zahn, J. Mehner, K. Hiller, B. Wunderle
  • April 2013, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/eurosime.2013.6529967

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The following have contributed to this page: Professor Dietrich RT Zahn