A perturbation finite element method for modeling electrostatic MEMS without remeshing

Mohamed Boutaayamou, Ruth V. Sabariego, Patrick Dular
  • April 2008, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/esime.2008.4525012

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http://dx.doi.org/10.1109/esime.2008.4525012

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