Finite Element Modeling of Electrostatic MEMS Including the Impact of Fringing Field Effects on Forces

M. Boutaayamou, K.H. Nair, R.V. Sabariego, P. Dular
  • Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/esime.2006.1643959

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http://dx.doi.org/10.1109/esime.2006.1643959

The following have contributed to this page: Mohamed Boutaayamou