Dynamic matching system for radio-frequency plasma generation

Anas Al Bastami, Alexander Jurkov, Parker Gould, Mitchell Hsing, Martin Schmidt, David J. Perreault
  • September 2016, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/ecce.2016.7855058

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http://dx.doi.org/10.1109/ecce.2016.7855058