Charge state distributions of Al and Cr cathodic arc plasmas

R. Franz, J. Wallig, P. Polcik, A. Anders
  • September 2012, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/deiv.2012.6412575
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http://dx.doi.org/10.1109/deiv.2012.6412575

The following have contributed to this page: Professor Andre Anders