S-shaped magnetic macroparticle filter for cathodic arc deposition

S. Anders, A. Anders, M.R. Dickinson, R.A. MacGill, I.G. Brown
  • IEEE Transactions on Plasma Science, January 1997, Institute of Electrical & Electronics Engineers (IEEE)
  • DOI: 10.1109/27.640683

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The following have contributed to this page: Professor Andre Anders