Investigation of oxygen followed by argon plasma treatment

What is it about?

The efficiencies of argon (Ar), oxygen (O2) and O2 followed by Ar (O2→Ar) plasma treatments are investigated in terms of contaminant removal and wire bond interfacial adhesion improvement, in order to resolve the “lifted ball bond” issue.

Featured Image

Why is it important?

The investigation of O2→Ar plasma treatment is still rarely focused in previous literature. Moreover, The observation that wire bond interfacial adhesion improvement after O2→Ar plasma treatment is lower than that with the O2 plasma treatment although it has the highest efficiency in surface contaminant removal also has not been reported on similar studies elsewhere.