Method for design of silicon micromotor
What is it about?
This paper aims to focus on the hybrid numerical method for effective design of silicon micromotor.
Why is it important?
This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows for taking advantage of FEM, namely possibility of calculations of complicated geometries (different electromagnetic devices too) without additional operations. A novel strategy in computer modeling of micromotor MEMS, based on the fast and very efficient hybrid method for analysis and design, is proposed.
The following have contributed to this page: Krzysztof Smółka
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