Numerical modeling of 3‐D comb drive electrostatic accelerometers structure (method of levitation force reduction)

Sławomir Wiak, Krzysztof Smółka
  • COMPEL The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, May 2009, Emerald
  • DOI: 10.1108/03321640910940864

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http://dx.doi.org/10.1108/03321640910940864

The following have contributed to this page: Krzysztof Smółka