Synchrotron-radiation-stimulated etching of polydimethylsiloxane using XeF2as a reaction gas

Tsung-Yi Chiang, Tetsuya Makimura, Tingchao He, Shuichi Torii, Tomoko Yoshida, Ryugo Tero, Changshun Wang, Tsuneo Urisu
  • Journal of Synchrotron Radiation, November 2009, International Union of Crystallography
  • DOI: 10.1107/s0909049509045658
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The following have contributed to this page: Dr Ryugo Tero