Ab initio study of the initial growth mechanism of silicon nitride on Si ( 100 ) − ( 2 × 1 ) using NH 3

Yuniarto Widjaja, Charles B. Musgrave
  • October 2001, American Physical Society (APS)
  • DOI: 10.1103/physrevb.64.205303

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http://dx.doi.org/10.1103/physrevb.64.205303

The following have contributed to this page: Charles Musgrave