A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera

Inho Song, Kazuhiro Iwata, Yusuke Homma, Smruti R Mohanty, Masato Watanabe, Toru Kawamura, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta
  • Plasma Sources Science and Technology, April 2006, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/15/3/004

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http://dx.doi.org/10.1088/0963-0252/15/3/004

The following have contributed to this page: Professor Akitoshi Okino