Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process

Li-Feng Wang, Lei Han, Jie-Ying Tang, Qing-An Huang
  • Journal of Micromechanics and Microengineering, May 2015, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/25/6/065007

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http://dx.doi.org/10.1088/0960-1317/25/6/065007

The following have contributed to this page: Professor Qing-An Huang