Clear evidence of mechanical deformation in RF-MEMS switches during prolonged actuation

V Mulloni, G Resta, B Margesin
  • Journal of Micromechanics and Microengineering, May 2014, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/24/7/075003

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http://dx.doi.org/10.1088/0960-1317/24/7/075003

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