A simple analytical method for residual stress measurement on suspended MEM structures using surface profilometry

V Mulloni, S Colpo, A Faes, B Margesin
  • Journal of Micromechanics and Microengineering, January 2013, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/23/2/025025

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http://dx.doi.org/10.1088/0960-1317/23/2/025025

The following have contributed to this page: Viviana Mulloni