Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication

  • Huan Hu, Hanna Cho, Suhas Somnath, Alexander F Vakakis, William P King
  • Nanotechnology, June 2014, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/25/27/275301

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http://dx.doi.org/10.1088/0957-4484/25/27/275301

The following have contributed to this page: Dr Huan Hu