Parallel-local anodic oxidation of silicon surfaces by soft stamps

  • Fabio Biscarini, Cristiano Albonetti, Javier Martinez, Nuria S Losilla, Pierpaolo Greco, Massimiliano Cavallini, Francesco Borgatti, Monica Montecchi, Luca Pasquali, Ricardo Garcia
  • Nanotechnology, September 2008, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/19/43/435303

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http://dx.doi.org/10.1088/0957-4484/19/43/435303

The following have contributed to this page: Massimiliano Cavallini