Spectroscopic ellipsometry time study of low-temperature plasma-polymerized plain trimethylsilane thin films deposited on silicon

  • Taher M El-Agez, David M Wieliczka, Chris E Moffitt, Sofyan A Taya
  • Physica Scripta, September 2011, Institute of Physics Publishing
  • DOI: 10.1088/0031-8949/84/04/045302

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The following have contributed to this page: Prof. Sofyan A Taya