Plasma properties in a large-volume, cylindrical and asymmetric radio-frequency capacitively coupled industrial-prototype reactor

Saša Lazović, Nevena Puač, Kosta Spasić, Gordana Malović, Uroš Cvelbar, Miran Mozetič, Maja Radetić, Zoran Lj Petrović
  • Journal of Physics D Applied Physics, January 2013, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/46/7/075201

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