Nanomechanical and nanotribological testing of ultra-thin carbon-based and MoST films for increased MEMS durability

  • S R Goodes, B Shi, B D Beake
  • Journal of Physics D Applied Physics, February 2009, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/42/6/065301

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

http://dx.doi.org/10.1088/0022-3727/42/6/065301

The following have contributed to this page: Professor Ben D Beake

In partnership with:

Link to Institute of Physics Publishing showcase

join the fight against climate change

Our simple summaries of climate research help you take action

Read now

climate-change.info