High aspect ratio Si micro-holes formed by wet etching using Pt needles

  • Kentaro Imamura, Tomoki Akai, Hikaru Kobayashi
  • Materials Research Express, July 2015, Institute of Physics Publishing
  • DOI: 10.1088/2053-1591/2/7/075901

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http://dx.doi.org/10.1088/2053-1591/2/7/075901