Laser optoacoustic method for quantitative nondestructive evaluation of the subsurface damage depth in ground silicon wafers

N B Podymova, A A Karabutov, E B Cherepetskaya
  • Laser Physics, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/1054-660x/24/8/086003

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http://dx.doi.org/10.1088/1054-660x/24/8/086003

The following have contributed to this page: Dr Natalia Podymova