Charging Effect in Plasma Etching Mask of Hole Array

Peng Zhang, Jun Wang, Yang Sun, Zejun Ding
  • Plasma Science and Technology, June 2013, Institute of Physics Publishing
  • DOI: 10.1088/1009-0630/15/6/15

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http://dx.doi.org/10.1088/1009-0630/15/6/15

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