Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOxfilm growth

Robert Franz, César Clavero, Jonathan Kolbeck, André Anders
  • Plasma Sources Science and Technology, January 2016, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/25/1/015022

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http://dx.doi.org/10.1088/0963-0252/25/1/015022

The following have contributed to this page: Professor Andre Anders