Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments

  • Katharina Stapelmann, Marcel Fiebrandt, Tim Styrnoll, Sabrina Baldus, Nikita Bibinov, Peter Awakowicz
  • Plasma Sources Science and Technology, June 2015, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/24/3/034014

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http://dx.doi.org/10.1088/0963-0252/24/3/034014