An open-ended coaxial plasma source with extended operating parameters: plasma impedance, coupling and energy efficiency

  • Pierre Baële, Stéphane Béchu, Alexandre Bès, Jacques Pelletier, Ana Lacoste
  • Plasma Sources Science and Technology, December 2014, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/23/6/064006

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http://dx.doi.org/10.1088/0963-0252/23/6/064006