Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6target

Robert Franz, César Clavero, Rustem Bolat, Rueben Mendelsberg, André Anders
  • Plasma Sources Science and Technology, April 2014, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/23/3/035001

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http://dx.doi.org/10.1088/0963-0252/23/3/035001

The following have contributed to this page: Professor Andre Anders