Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons

Matjaž Panjan, Robert Franz, André Anders
  • Plasma Sources Science and Technology, March 2014, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/23/2/025007

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http://dx.doi.org/10.1088/0963-0252/23/2/025007

The following have contributed to this page: Professor Andre Anders