Magnetic system for producing uniform coatings using a filtered cathodic arc

Marcela M M Bilek, André Anders, Ian G Brown
  • Plasma Sources Science and Technology, October 2001, Institute of Physics Publishing
  • DOI: 10.1088/0963-0252/10/4/309

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http://dx.doi.org/10.1088/0963-0252/10/4/309

The following have contributed to this page: Professor Andre Anders