Dynamic nonlinear behavior of torsional resonators in MEMS

  • A Caspani, C Comi, A Corigliano, G Langfelder, V Zega, S Zerbini
  • Journal of Micromechanics and Microengineering, August 2014, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/24/9/095025

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http://dx.doi.org/10.1088/0960-1317/24/9/095025