Low-temperature anodic bonding using thin films of lithium-niobate-phosphate glass

  • S Woetzel, E Kessler, M Diegel, V Schultze, H-G Meyer
  • Journal of Micromechanics and Microengineering, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/24/9/095001

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http://dx.doi.org/10.1088/0960-1317/24/9/095001