Acoustic lens for capacitive micromachined ultrasonic transducers

Chienliu Chang, Kamyar Firouzi, Kwan Kyu Park, Ali Fatih Sarioglu, Amin Nikoozadeh, Hyo-Seon Yoon, Srikant Vaithilingam, Thomas Carver, Butrus T Khuri-Yakub
  • Journal of Micromechanics and Microengineering, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/24/8/085007

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http://dx.doi.org/10.1088/0960-1317/24/8/085007