Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer

  • In-Hyouk Song, William B D Forfang, Bryan Cole, Byoung Hee You
  • Journal of Micromechanics and Microengineering, September 2014, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/24/10/105002

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http://dx.doi.org/10.1088/0960-1317/24/10/105002