Patterning PDMS using a combination of wet and dry etching

B Balakrisnan, S Patil, E Smela
  • Journal of Micromechanics and Microengineering, March 2009, Institute of Physics Publishing
  • DOI: 10.1088/0960-1317/19/4/047002

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http://dx.doi.org/10.1088/0960-1317/19/4/047002

The following have contributed to this page: Professor Elisabeth Smela