Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining

  • Emad Mehdizadeh, Amir Rahafrooz, Siavash Pourkamali
  • Nanotechnology, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0957-4484/25/31/315303

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http://dx.doi.org/10.1088/0957-4484/25/31/315303