High-speed metrological large range AFM

  • Gaoliang Dai, Fan Zhu, Jens Fluegge
  • Measurement Science and Technology, July 2015, Institute of Physics Publishing
  • DOI: 10.1088/0957-0233/26/9/095402

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http://dx.doi.org/10.1088/0957-0233/26/9/095402