High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator

  • Youichi Bitou, Yohan Kondo
  • Measurement Science and Technology, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0957-0233/25/9/095202

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http://dx.doi.org/10.1088/0957-0233/25/9/095202