Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film

Sarab Preet Singh, P Srivastava, S Ghosh, Saif Ali Khan, G Vijaya Prakash
  • Journal of Physics Condensed Matter, February 2009, Institute of Physics Publishing
  • DOI: 10.1088/0953-8984/21/9/095010
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The following have contributed to this page: Dr Vijaya Prakash Gaddam