Optical and structural characterization of rapid thermal annealed non-stoichiometric silicon nitride film

Sarab Preet Singh, P Srivastava, G Vijaya Prakash, M H Modi, Sanjay Rai, G S Lodha
  • Journal of Physics Condensed Matter, July 2008, Institute of Physics Publishing
  • DOI: 10.1088/0953-8984/20/33/335232
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The following have contributed to this page: Dr Vijaya Prakash Gaddam