Structural analysis of textured silicon surfaces after ion implantation under tilted angle

  • Jan Krügener, Eberhard Bugiel, Robby Peibst, Fabian Kiefer, Tobias Ohrdes, Rolf Brendel, H Jörg Osten
  • Semiconductor Science and Technology, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0268-1242/29/9/095004

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http://dx.doi.org/10.1088/0268-1242/29/9/095004