Infrared spectroscopic investigations of the buried interface in silicon bonded wafers

C Himcinschi, M Friedrich, K Hiller, T Gessner, D R T Zahn
  • Semiconductor Science and Technology, February 2004, Institute of Physics Publishing
  • DOI: 10.1088/0268-1242/19/5/005
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The following have contributed to this page: Professor Dietrich RT Zahn