Infrared spectroscopic investigations of the buried interface in silicon bonded wafers

C Himcinschi, M Friedrich, K Hiller, T Gessner, D R T Zahn
  • Semiconductor Science and Technology, February 2004, Institute of Physics Publishing
  • DOI: 10.1088/0268-1242/19/5/005

The authors haven't finished explaining this publication. If you are the author, sign in to claim or explain your work.

Read Publication

The following have contributed to this page: Professor Dietrich RT Zahn