Infrared study of Si surfaces and bonded Si wafers

A Milekhin, M Friedrich, K Hiller, M Wiemer, T Gessner, D R T Zahn
  • Semiconductor Science and Technology, January 1999, Institute of Physics Publishing
  • DOI: 10.1088/0268-1242/14/1/009
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http://dx.doi.org/10.1088/0268-1242/14/1/009

The following have contributed to this page: Professor Dietrich RT Zahn