Structural and ellipsometric study on tailored optical properties of tantalum oxynitride films deposited by reactive sputtering

Angélique Bousquet, Fadi Zoubian, Joël Cellier, Christine Taviot-Gueho, T Sauvage, Eric Tomasella
  • Journal of Physics D Applied Physics, November 2014, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/47/47/475201

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http://dx.doi.org/10.1088/0022-3727/47/47/475201