DLC coating on a micro-trench by bipolar PBII&D and analysis of plasma behaviour

  • Wonsoon Park, Hideyuki Tokioka, Masaaki Tanaka, Junho Choi
  • Journal of Physics D Applied Physics, July 2014, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/47/33/335306

The authors haven't yet claimed this publication.

Read Publication

http://dx.doi.org/10.1088/0022-3727/47/33/335306