The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

A Anders, J Čapek, M Hála, L Martinu
  • Journal of Physics D Applied Physics, December 2011, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/45/1/012003

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http://dx.doi.org/10.1088/0022-3727/45/1/012003

The following have contributed to this page: Professor Andre Anders