Distance-dependent plasma composition and ion energy in high power impulse magnetron sputtering

Arutiun P Ehiasarian, Joakim Andersson, André Anders
  • Journal of Physics D Applied Physics, June 2010, Institute of Physics Publishing
  • DOI: 10.1088/0022-3727/43/27/275204

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http://dx.doi.org/10.1088/0022-3727/43/27/275204

The following have contributed to this page: Professor Andre Anders