Self-aligned gate dielectric in carbon nanotube field-effect transistors by anodic oxidation of aluminium

Jeff T.H. Tsai, Wei-Syun Wang, Szu-Hung Chen, Chia-Liang Sun
  • Journal of Experimental Nanoscience, February 2013, Taylor & Francis
  • DOI: 10.1080/17458080.2011.561451

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