Process parameter effects on residual stress and phase purity after microlaser-assisted machining of silicon

  • Sean McCoy Langan, Deepak Ravindra, Adrian B. Mann
  • Materials and Manufacturing Processes, April 2018, Taylor & Francis
  • DOI: 10.1080/10426914.2018.1453145

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http://dx.doi.org/10.1080/10426914.2018.1453145