Prediction of silicon dry etching using a piecewise linear algorithm

V.M. Jimenez-Fernandez, C. Reyes-Betanzo, M. Angelica-Cerdan, Z.J. Hernandez-Paxtian, H. Vazquez-Leal, A. Itzmoyotl-Toxqui
  • Journal of the Chinese Institute of Engineers, October 2013, Taylor & Francis
  • DOI: 10.1080/02533839.2012.743231
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