High frequency calibration of MEMS microphones using spherical N-waves

S. Ollivier, C. Desjouy, P. Y. Yuldashev, A. Koumela, E. Salze, M. Karzova, L. Rufer, Ph. Blanc-Benon
  • January 2015, American Institute of Physics
  • DOI: 10.1063/1.4934394

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The following have contributed to this page: Maria Karzova